Fig. 3: Comparative structural analyses before and after SOA.

XRD θ–2θ patterns of SRO (20 nm) capped SMO thin films before and after oxygen annealing with a thickness of a 20 nm and b 115 nm. Comparison of the c c-lattice parameters, which were calculated from the XRD θ–2θ data using Bragg’s law (2dsinθ = nλ) and d FWHM intensities of the SMO (002) peaks for both the as-grown and SOA-treated SMO films depending on their thickness (20, 45, 69, 92, and 115 nm).