Table 1 List of the PMMA/SiOx/Si(111) samples in the present work

From: Depth analysis of local conformation in poly(methyl methacrylate) adsorbed onto SiOx studied by soft X-ray absorption spectroscopy combined with an Ar gas cluster ion beam

Sample name

Thickness

Annealing time at 423 K

Experimental data

PMMA-1

96 nm

24 hours

Fig. 2

PMMA-2

18 nm

N/A

Fig. 3

PMMA-3

18 nm

0.5 hours

Fig. 3

PMMA-4

18 nm

12 hours

Fig. 3

PMMA-5

18 nm

24 hours

Figs. 3 and 4

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