Fig. 1

Fabrication of highly compliant PHE sensors. a Schematics on the fabrication process. An ultrathin polymeric foil is attached to a supporting glass substrate. Optionally, an SU-8 smoothing layer can be added before the first patterning step. The magnetic sensing layer is prepared by photolithography and e-beam evaporation. Contact lines are realized in subsequent lithography and evaporation steps. Finally, the device is detached from the supporting glass slide. SEM imaging of a compliant PHE sensor in a planar b, biaxially bent c, and uniaxially bent d states. e SEM image showing a cross-section of the sample prepared using FIB milling