Fig. 3

Mechanical integrity tests. a Dynamic cycling of a compliant PHE sensor. The top dataset represents the measured longitudinal resistance along the bending direction. The bottom dataset shows the measured transversal voltage (Hall voltage) perpendicular to the bending direction. b SEM images of a bent sensor. The radius of curvature is gradually changing from about 100–300 µm. The close-up images of the regions indicated in panel b are shown for the case of the bending radius of c 290 µm and d 110 µm