Table 1 Grating periods determined from GISAXS diffraction patterns of Si molds and the corresponding CdA replica
Sample | Period (nm) |
|---|---|
SP Si | 276 ± 2 |
MP Si | 352 ± 3 |
LP Si | 417 ± 5 |
SP CdA | 276 ± 5 |
MP CdA | 355 ± 7 |
LP CdA | 409 ± 10 |
Sample | Period (nm) |
|---|---|
SP Si | 276 ± 2 |
MP Si | 352 ± 3 |
LP Si | 417 ± 5 |
SP CdA | 276 ± 5 |
MP CdA | 355 ± 7 |
LP CdA | 409 ± 10 |