Fig. 3: Comparison of the flat and micro-structured sensors.

a Capacitance changes of the flat sensor under the external pressure within 100 kPa; b Sensitivity comparison of the flat and micro-structured sensors within the range of 0–600 kPa; c Schematic diagram of the two sensors under the external pressure from Comsol simulation; d Compression displacement comparison of the two sensors; e Schematic diagram of the changes in the two sensors’ distance and contact area under a given pressure.