Fig. 6: Performance testing of PSIFS.

a Measurement curve in full range. b Sensitivity curve and error PSIFS. The error bar shows the standard deviation. c Inductance variation curves of PSIFS at the same measurement position in lifting and returning. d Cycling test of PSIFS in minimum resolution displacement (20 μm). e Measurement curve of the response time of PSIFS. f Long-term stability test curve of PSIFS.