Table 2 Description of the samples’ nomenclature, the thickness of the passivation layer, lithography used and the rear stack.
Substrate/Device name | Lithography technique | Dielectric layer thickness (nm) | Rear stack |
|---|---|---|---|
EBL-SLG | EBL | 8 | SLG/Mo/SiOx |
NIL-SLG | NIL | 20 | SLG/Mo/SiOx |
Flexible | NIL | 20 | Steel/Mo/SiOx |