Fig. 3: Sensing performance of the strain sensor designed by the GSS method.

a Change of capacitance over the strain ranges up to 50%. b Response time. c Hysteresis of the capacitive-type strain sensor under three loading (50%)/unloading cycles. d Working stability tested over 2000 cycles at 40% strain. The inset is an enlarged view of the change in capacitance of the sensor during cycles 320 to 330 and cycles 1650 to 1660. e Comparison of the sensitivity and sensing range of our capacitive-type strain sensor with existing sensors.