Fig. 2: Characterization of hourglass-shaped microstructured capacitive pressure sensors. | npj Flexible Electronics

Fig. 2: Characterization of hourglass-shaped microstructured capacitive pressure sensors.

From: Tactile near-sensor computing systems incorporating hourglass-shaped microstructured capacitive sensors for bio-realistic energy efficiency

Fig. 2

a Normalized capacitive response of the sensor under pressures of 0.0, 0.5, 5.0, and 25 kPa. b Response and relaxation times of the pressure sensor at 0.35 kPa. c Relative capacitance change under a slight pressure of 2.5 Pa. d Normalized capacitive response during the loading/unloading cycle from 0 to 100 kPa. e Long-term stability of the sensor over 1100 loading/unloading cycles at 4.50 kPa. Capacitance variations corresponding to (f) wrist and (g) radial artery pulses. h Comparison of aspect ratios for microstructures and pressure ranges with high sensitivity (>0.5 kPa−1) in the proposed sensors versus previously reported devices incorporating microstructured films.

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