Fig. 3: Pressure sensing performance of the MAWPS with axial magnetized cilia.

a The change in relative impedance with increasing pressure under optimal parameters of the MAWPS. Here, the green circles represent the actual measured data points, and the red dashed line corresponds to the associated linear fitting curve, with the slope of the fitted curve explicitly annotated adjacent to the line. b Impedance changes as function of applied pressure of 2.4 Pa during the loading and unloading process. c Relative impedance changes of the MAWPS under the loading with different amplitudes of the applied small pressure. d Measurement of the response time of the MAWPS at a fast loading and unloading cycle. e Relative impedance changes of the MAWPS architecture over 100 loading and unloading cycles at B-value from 0 to 0.5 mm. f Performance comparison of the MAWPS with other magnetic pressure sensors. Here, the parameter of MAWPS was selected as optimal value.