Table 1 Parameters used for participation ratio simulations in Fig. 5

Interface	\(\tan \delta\)	ϵ_r	Thickness	Thickness
			Fig. 5b	Fig. 5c
Al	-	-	150 nm	50–500 nm
Air	0	1.0	2 mm	2 mm
Si	10⁻⁷	11.7	280 μm	280 μm
MA	10⁻³	7.0	5 nm	5 nm
SA	10⁻³	4.0	2 nm	2 nm
SM	10⁻³	4.0	0.4–2 nm	0.5 nm
corner	10⁻³	4.0

Note: For simplicity, the air environment (cryogenic vacuum) is assumed lossless and the values of \(\tan \delta\) for SM, SA, and MA interfaces are considered equal. \(\tan \delta ={10}^{-3}\) stands at the lower bound of the limits reported by Wang et al.⁴⁶. The CPW dimensions are w = 20 μm and g = 10 μm.

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