Fig. 1: Device schematics and micrographs.

a, b Optical micrographs and corresponding circuit schematics for Si-fin lumped element resonators and transmons respectively. The functional components of the fin transmon are indicated and illustrate the capacitive coupling of the fin transmon to the readout resonator (RO). c Scanning electron micrograph of a Si-fin transmon. The insets show the Josephson junction region in higher magnification.