Fig. 2: Measurement results from RF characterization of lumped element resonators (LER).
a Measured resonant frequency vs metallized capacitor length (L) for LERs. The inset includes an optical micrograph of a device with the dimension L indicated. Electromagnetic simulations of the inductor loop suggest that the fin structure contributes 81--84% of the total resonator capacitance. b Extracted internal quality factor (Qi) plotted against the estimated photon number in the cavity of the four resonators measured in (a).
