Extended Data Fig. 3: EBL-patterned 100 nm thick ZIF-71 film. | Nature Materials

Extended Data Fig. 3: EBL-patterned 100 nm thick ZIF-71 film.

From: Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks

Extended Data Fig. 3: EBL-patterned 100 nm thick ZIF-71 film.The alternative text for this image may have been generated using AI.

SEM images of EBL-patterned ZIF-71 patterns with different sizes of trenches: a, 70 nm; b, 100 nm; c, 200 nm; d, 500 nm. SEM images of EBL-patterned ZIF-71 patterns with different sizes of square-shaped holes: e, 70 nm; f, 100 nm; g, 200 nm; h, 500 nm.

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