Extended Data Fig. 1: Illustration fabrication process. | Nature Photonics

Extended Data Fig. 1: Illustration fabrication process.

From: An adaptive moiré sensor for spectro-polarimetric hyperimaging

Extended Data Fig. 1: Illustration fabrication process.The alternative text for this image may have been generated using AI.

(a) Vias drilling and coating. (b) Photonic crystal (PhC) fabrication. (c) MEMS process. (d) Vapour releasing. (e) Top layer fabrication and bonding. Blue: Silicon. Grey: Silicon oxide. Purple: Silicon Nitride. Orange: Conductive layer. Yellow: SU-8.

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