Extended Data Fig. 1: Nano-OLED Fabrication.
From: Scalable nanopatterning of organic light-emitting diodes beyond the diffraction limit
a, Schematic diagram illustrating the fabrication procedure for the bottom-emitting Nano-OLEDs. The additional process following the red arrows yields the configuration “Insulation”. b, Photographs of a 4-inch nanostencil wafer containing 52 chips. Each chip has 64 freestanding windows made by nanoaperture SiNx membrane of dimension of 100 × 100 µm2. Scale bars in right micrographs (top to bottom): 2 mm; 25 µm; 500 nm. c-d, Representative SEM images for the nanostencils (c) and resulting nanopatterns of organic semiconductors (d). e, Representative AFM images for the deposited nanopatterns of organic semiconductors.
