Fig. 3: Experimental demonstration of LSOM.
Scanning electron microscopy (SEM) images of nanoscale objects with various shapes, sizes and symmetries (top row; scale bars, 200 nm) are compared with ideal conventional coherent Fourier images with NA = 0.9 (second row), simulated LSOM images (third row) and experimental LSOM images (fourth row). LSOM provides a dramatic improvement in resolving power compared with the Fourier imaging. The spatial spectra of the experimental images (fifth row) indicate an effective NA of 3.14, where k0 = 2π/λ.
