Extended Data Fig. 1: Characterization of the ALD platinum layers.
From: Electronically integrated, mass-manufactured, microscopic robots
a, X-ray reflectometry thickness measurements as a function of the number of growth cycles of ALD. The first 30 cycles are a nucleation phase where the film grows rapidly in thickness. Once the surface is covered in platinum, a bulk growth phase begins at a slower rate. b, Resistivity measurements (via four-point probe) as a function of ALD cycle number. We interpret the dramatic drop in resistivity after about 30 cycles as clear evidence that a continuous electrical film has formed.
