Extended Data Fig. 2: TEM imaging of SEA structure and morphology.
From: Electronically integrated, mass-manufactured, microscopic robots
a, Cross-sectional TEM image of a titanium–platinum SEA structure, with colours coded by electron energy loss spectroscopy. Silicon is shown in red, titanium in green, oxygen in blue and platinum in white. b, In-plane TEM image of an ALD platinum film showing crystal grain sizes of approximately 10 nm. Scale bars, 10 nm.
