Extended Data Fig. 2: The quality verification of self-oxidized AlOx. | Nature

Extended Data Fig. 2: The quality verification of self-oxidized AlOx.

From: Vertical MoS2 transistors with sub-1-nm gate lengths

Extended Data Fig. 2

(a) The I-V curves another 10 devices. The 2.4 V voltage drop between graphene and Al is a safe value for the measurements. (b) A typical optical image of the measured structure. (c) The diagram of the measured structure. After Al deposited on graphene, the samples are stored in clean atmosphere condition for more than 3 days. Then, Al is surrounded by dense AlOx layer, and Pt is deposited after EBL process.

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