Extended Data Fig. 9: Blue LED grown via remote epitaxy on GaN wafer.
From: Vertical full-colour micro-LEDs via 2D materials-based layer transfer
a, Schematic illustrations of the epitaxial structures of InGaN-based blue LED grown on GaN wafer. b, AFM morphology image of a GaN film grown via remote epitaxy. c, SEM images of the surfaces of GaN films grown via remote (left) and van der Waals (right) epitaxy techniques. d-e, Measured EQEs and luminance of blue µLEDs of varying size grown on GaN substrate.
