Extended Data Fig. 9: Electrical performance of 2D FinFETs fabricated with Bi2SeO5 dielectric. | Nature

Extended Data Fig. 9: Electrical performance of 2D FinFETs fabricated with Bi2SeO5 dielectric.

From: 2D fin field-effect transistors integrated with epitaxial high-k gate oxide

Extended Data Fig. 9: Electrical performance of 2D FinFETs fabricated with Bi2SeO5 dielectric.The alternative text for this image may have been generated using AI.

a, Schematic diagram of a 2D FinFET fabricated with Bi2SeO5 dielectric solely. b, Tilted-view SEM image of as-fabricated FinFET with a channel length (Lch) of 3 μm. c,d, Transfer (c) and output (d) curves of the FinFET in b.

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