Extended Data Fig. 5: TEM and EDS analysis of the vertically stacked 3-tier MoS2.
From: Three-dimensional integration of two-dimensional field-effect transistors
a) Zoomed in HAADF-STEM image of each tier shows the thin MoS2 layer between gate dielectric and contact pads. b) Corresponding EDS elemental mapping shows the presence of Mo and S in each tier.
