Extended Data Fig. 1: Process pressure parameters and deposition rate of the SnOx layer by ALD.
From: Flexible perovskite/silicon tandem solar cell with a dual-buffer layer
a–e, Process pressure as a function of time using different purging times. f, Thickness of the deposited SnOx layers as a function of ALD cycles. The fitted average rates for 10 s and 2 s are 1.5 Å per cycle and 2.3 Å per cycle, respectively.
