Extended Data Fig. 6: Greyscale printing by means of SLM tuning.
From: 3D nanolithography with metalens arrays and spatially adaptive illumination
a,b, SEM images of a line array printed by sweeping the SLM phase value (metalens NA: 1.0). Specific SLM values are not listed owing to different settings for each metalens. c,d, Measurements of linewidths in a showing tunable voxel size at the subdiffraction regime and stable voxel size at the diffraction-limited regime. e,f, SEM images of 3D subdiffraction features. The measured lateral and axial linewidth are 316.4 nm and 1.876 µm, respectively.
