Extended Data Fig. 7: Structural compression and throughput scaling.
From: 3D nanolithography with metalens arrays and spatially adaptive illumination
a, Definition of the compression factor of a structure. As an example, the structure is divided into 5 × 5 substructures. Then, all of the substructures are overlaid to obtain the compressed structure. The stage scans over the entire compressed structure with active focal spot modulation to print the desired structure. It can be derived that the compression factor is determined by the average density and the overlaid density of the structure. b, Chart showing the effective fabrication speed with varying compression factors. The near-term scaling of this work is discussed in section ‘Discussion on the current limit and near-term scaling of the fabrication throughput’ in the Supplementary Information.
