Fig. 3: Characterization of mechanical resonance modes.

a, Finite-element method simulations for seven of the resonant modes of a curled cantilever (L = 950 μm, W = 70 μm). Below: stroboscopic images of a resonantly driven ski-jump. b–f, Intensified charge-coupled device (ICCD) images of the waveguide output on-resonance (Y1 ≈ 1.3 (b), Y2 ≈ 6.5 (c), X1 ≈ 4.9 (d), Y1 = 1.25 (e) and Y2 = 6.5 (f) kHz) with various sinusoidal drive voltages (streak labels in Vpp) for a device with dimensions L = 950 μm and W = 70 μm. The first two longitudinal modes and the first lateral mode are in high-vacuum (b–d) or ambient (e,f) conditions. In b–d, approximate frequencies are given as resonance frequency shifts with voltage due to thermal redshifting. The exposure time is greater than the drive signal period so that the full range of motion is observed. Time-resolved motion was also recorded using high-speed gating of the ICCD (Supplementary Video 4). g, Optically broadband operation of a ski-jump on-resonance (Y2 = 6.75 kHz, 40 Vpp), under ambient conditions. h,i, Small-signal frequency response of X and Y beam displacement. Measurements were taken with the device at room temperature under atmospheric pressure, rough vacuum or high vacuum (h), and cryogenic conditions under high vacuum (i). Data are normalized to the Y displacement at low frequencies. j, Ring-down measurement for the fundamental longitudinal mode under high vacuum at room temperature.