Figure 3
SEM cross-sections of the same magnification (25,000) of the ZnO films deposited on the Al surfaces at different T S, showing an appreciable inclination of ~30° from the surface normal. Uniform inclinations are observed at 100 °C, 200 °C and 300 °C. At 25 °C, the ZnO inclination is discontinuous as the film thickness increases. All scale bars represent 1 µm. The last two reflector layers of SiO2 and Mo are observable and the ZnO film for T S is ~200 nm thinner due to rapid decrease of the deposition rate over a short distance across the samples.
