Figure 4
X-ray pole figures of ZnO grown on Al deposited at different T S, showing distribution of c-axis inclination angles with respect to the surface normal (Ψ = 0). The calculated areas enclosed within the contour surrounding the maximum intensity indicate the dispersion of the c-axis inclination angles. Narrower dispersions (smaller area) are observed when ZnO is deposited on Al sputtered at T S = 100 °C. Large dispersions are observed in the case of Al sputtered at T S of 200 °C and 300 °C. A gradual increase of the mean value of Ψ (position of center of red regions) and the FWHM (ΨI/2) of the peak intensity can be observed as T S increases from 25 °C to 300 °C.
