Figure 6

Comparison of imaging resolution. Panels (a) and (b) show the modulus of the reconstructed object space for the SXRL and HHG measurement, respectively. The scale bar in Panel (a) is one micron for both panels. (c) The achieved resolution for HHG-CDI is 48 nm (blue line) and approximately 180 nm for the SXRL-CDI measurement (red line). The line profiles were taken at the position of the dotted white line in Panels (a) and (b), respectively.