Figure 2
From: Next Generation Ceramic Substrate Fabricated at Room Temperature
Difference between AD and GSV: (a) overall equipment, (b) bottleneck of aerosol chamber, and (c) deposition behavior. A lump of powders is not formed in a GSV process. For film deposition, the fine particles must be fractured to be nano-size. The compaction of particles can assist the densification of films. The film thickness is dependent on the portion of trapped sub-micron grains.
