Figure 5
From: Next Generation Ceramic Substrate Fabricated at Room Temperature
XRD patterns of (a) AlN powders and (b) AlN AD/GSV films. The peaks for Al2O3 are observed when they are heat-treated at 850 °C.
Figure 5 | Scientific Reports
From: Next Generation Ceramic Substrate Fabricated at Room Temperature
XRD patterns of (a) AlN powders and (b) AlN AD/GSV films. The peaks for Al2O3 are observed when they are heat-treated at 850 °C.
