Figure 6
From: Next Generation Ceramic Substrate Fabricated at Room Temperature
(a) TEM and (b) SEM images of AlN AD film and AlN GSV film. The small Al2O3 grains are observed among the large AlN grains in AlN AD films more than in AlN GSV films. primary particles. The GSV films can be formed by using the fragile granules. The AlN films show the dense microstructures. It is difficult for AlN AD films to be deposited thicker than 30 µm.
