Figure 7
From: Next Generation Ceramic Substrate Fabricated at Room Temperature
(a) Electric and (b,c) thermal properties of AlN AD films and AlN GSV films. The thicker the film thickness is, the higher the breakdown voltage is. The dielectric strength of an AlN GSV film is much higher than that of an AlN bulk-ceramic which is commercialized. The thermal properties of AlN GSV films are better than those of the others.
