Figure 6

Detecting performance of the HPEDL in three-dimensional simulations. The HPEDL is used to detect two related patterns: (a) a square PMMA with 200 nm width; (b) two PMMA strips with 20 nm width and 200 nm long, the center-to-center separation of the strips is chosen to be 200 nm. The simulated electric-field distributions |E _z | and |E _x | for both structures are illustrated.