Figure 1

Qualitative comparison of (a) ID sensor and (b) back-thinned, front-illuminated MAPS DD sensor. Each schematic shows a single primary electron passing through the sensor. Solid lines represent electron trajectories. Dotted lines represent photon trajectories. Stars represent scattering events. The shaded yellow region represents electron-hole pair generation. The pixel pitches correspond to the Gatan US1000FTXP and Gatan K2 for the ID and DD sensor, respectively. Layer thicknesses for the DD sensor are taken from ref. 37, and do not necessarily correspond to the K2.