Figure 4

Residual stress, σr, and sheet resistivity, ρ, of 500 nm thick Mo-Re thin films with different Re contents measured on Si substrates. The lines are a guide to the eye and imply no physical meaning.

Residual stress, σr, and sheet resistivity, ρ, of 500 nm thick Mo-Re thin films with different Re contents measured on Si substrates. The lines are a guide to the eye and imply no physical meaning.