Table 1 Set of parameters used in the present work and in several references where regular LIPSS were obtained.

From: High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity

Materials

Wavelength λ (nm)

Pulse duration τ (fs)

Energy per pulse E (nJ)

F * [J/cm 2] (F abs † [J/cm2])

Repetition rate f (kHz)

Scanning velocity v

Spot diameter σ at 1/e2 (μm)

Effective pulse number#

Overlapping§ (%)

Throughput (109  μm 2/h)

DLOA δθ

LIPSS period Λ (nm)

Reference

Cr

1030

500

1950

0.039 (0.017)

250

1.5 m/s

80

13.3

92.5

9

13.0° ± 1.0°

913 ± 53

Ref. 15.

Mo

1030

213

583

0.69 (0.228)

600

1.7 m/s

10.4

3.67

72.8

21

5.3° ± 0.5°

845 ± 38

This work

800

50

—

0.07 (0.031)

1

0.04 mm/s

~30

~750

99.9

0.0058

8.3° ± 0.5°

589 ± 30

Ref. 24.

Ti

1030

213

500

0.59 (0.228)

600

3 m/s

10.4

2.08

51.9

38

9.2° ± 0.5°

737 ± 26

This work

800

30

—

0.033 (0.013)

1

0.6 mm/s

22

37

97.2

<0.05

8.5° ± 0.5°

~660

Ref. 25.

Steel

1030

213

383

0.45 (0.159)

600

3 m/s

10.4

2.08

51.9

38

9.2° ± 0.5°

901 ± 38

This work

790

30

—

0.055 —

1

5 mm/s

280

56

98.2

<5.1

15.0° ± 1.0°

600 ± 80

Ref. 9

Ni

1026

232

130

0.46 (0.129)

1

0.5 mm/s

6

12

91.7

—

20.0° ± 0.8°

760 ± 120

Ref. 26.

800

90

—

0.16 (0.051)

1

2.0 mm/s

40

20

95.0

—

14.6° ± 0.5°

~650

Ref. 27.

Al

1030

213

917

1.08 (0.053)

600

3 m/s

10.4

2.08

51.9

—

26.7° ± 0.5°

842 ± 134

This work

Cu

1030

213

1500

1.77 (0.070)

600

3 m/s

10.4

2.08

51.9

—

23.8° ± 0.5°

956 ± 85

This work

Au

1030

213

4080

4.80 (0.101)

600

3 m/s

10.4

2.08

51.9

—

48.8° ± 1.0°

893 ± 160

This work

  1. Throughputs and DLOAs for highly regular LIPSS (HR-LIPSS) fabricated in this work are highlighted by bold typesetting. * F is the average fluence of individual laser pulses and was estimated by the expression F = 4E/(πσ 2), where σ is the spot diameter at 1/e2 of peak intensity. †The absorbed fluence, F abs = (1 − R)F, was obtained using the room temperature reflection coefficient R from Johnson et al.28 for Ti and Cr, from Ordal et al.29 for Mo, from Palik30 for Ni, Al, Cu and Au. For steel, effective medium theory is used (see also Table 2). However, it must be emphasized that depending on metals, the optical properties can significantly vary during the irradiation, leading to a drop in the reflectivity and an increased absorbed fluence31. #The pulse number is N = fσ/v where f is the repetition rate of the laser and v is the scanning velocity. §The overlap is estimated as (1 − 1/N) × 100%.
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