Figure 2
Angle-resolved XPS spectra of (a,b) In 3d, (c,d) Ga 2p, and (e,f) As 3d peaks measured from the HfO2/Al2O3 films on In0.53Ga0.47As after PMA at 400 °C for 30 min: (a,c,e) FGA and (b,d,f) H2-HPA.
Figure 2 | Scientific Reports
Angle-resolved XPS spectra of (a,b) In 3d, (c,d) Ga 2p, and (e,f) As 3d peaks measured from the HfO2/Al2O3 films on In0.53Ga0.47As after PMA at 400 °C for 30 min: (a,c,e) FGA and (b,d,f) H2-HPA.
