Figure 4
Dimensionless in-plane thermal conductivity of silicon thin layers: (a) Comparison of the in-plane thermal conductivity of silicon layers obtained by different models (lines, same as Fig. 3), and experimental data from Ju and Goodson (squares), Liu and Asheghi (dots), and Ju (triangles) versus thickness at 300 K. (b) Comparison of the in-plane thermal conductivity versus temperature with thickness of 1.6 μm obtained by different models (lines same as Fig. 3) with available experimental data from Asheghi (scatters), and bulk thermal conductivity of silicon from Sellitto, A. (dash dot line).
