Figure 3

(a) HRTEM image of biphase thin film deposited with 17 sccm O2 at the initial growth region. Along the column growth direction, three square regions are marked as 1, 2 and 3. (b–d) Are the FFT patterns of square regions 1, 2 and 3 in (a), respectively. The red circles in (b–d) represent the diffraction spots along the column growth direction, with the d values of about 2.1 Å.