Figure 1

(a) Normalised room temperature CL spectra of the semi-polar \(\mathrm{(11}\bar{2}\mathrm{2)}\) Al x Ga1−x N epilayers with AlN concentrations raging from x = 0.38 to 0.56. (b) FWHM as a function of composition of the \(\mathrm{(11}\bar{2}\mathrm{2)}\) AlGaN and c-plane AlGaN from Ref. 23. (c) SE and integrated CL intensity images of the AlGaN peaks. The CL was recorded more slowly than the SE images, which were acquired first from the same areas, causing distortion due to sample drift in the samples with higher AlN fraction.