Table 1 Chemical compositions of the ITO, conduction WIZO, and semiconducting WIZO layers.

From: Enhancement of the Device Performance and the Stability with a Homojunction-structured Tungsten Indium Zinc Oxide Thin Film Transistor

 

W4f

Chemical composition (at. %)

In3d

Zn2p

Sn3d

O1s

ITO

53.1

5.3

41.6

Conducting WIZO

0.6

25.7

22.9

50.8

Semiconducting WIZO

0.4

24.8

19.8

55.1