Figure 3
From: Structural evolution of tunneling oxide passivating contact upon thermal annealing
Spectroscopic Ellipsometry (SE) measurement and modeling results of the thin film back surface field before and after annealing at 600 °C. (a) Model structure of the as-deposited sample. (b) Measured and modeled SE spectra of the as-deposited state. (c) Measured and modeled SE spectra of the sample annealed at 600 °C for one minute. (d) Measured and modeled SE spectra of the sample annealed at 600 °C for five minutes.
