Figure 5
From: Structural evolution of tunneling oxide passivating contact upon thermal annealing
Spectroscopic Ellipsometry (SE) measurement and modeling results of the thin film back surface field before and after annealing at temperatures over 800 °C. The Bruggeman effective medium approximation was used to model the measured spectra. (a) Measured and modeled SE spectra of the as-deposited state. (b) Measured and modeled SE spectra of the sample annealed at 800 °C for five minutes. (c) Measured and modeled SE spectra of the sample annealed at 900 °C for five minutes. (d) Measured and modeled SE spectra of the sample annealed at 1000 °C for five minutes.
