Figure 5

(a) PL of the 4H-SiC layer at different temperatures ranging from 84 K to 203 K after neutron irradiation with fluence of 7.29 × 10¹⁴ cm⁻²; (b) the variation of the peak intensity of the PL spectra at different temperatures before (black open blocks) and after neutron irradiation (blue open circles with neutron radiation fluence of 1.31 × 10¹⁴ cm⁻² and blue open up-triangles with neutron radiation fluence of 7.29 × 10¹⁴ cm⁻²) and the position of the PL peaks after irradiated by neutrons (brown open stars) with fluence of 7.29 × 10¹⁴ cm⁻² at different temperatures.