Table 1 Parameters used for temperature distribution calculation.
From: Laser Thinning and Patterning of MoS2 with Layer-by-Layer Precision
Parameters | Value |
|---|---|
Mass density of MoS2 ρ | 5.1 × 10−12 g/μm3 |
Laser beam radius r g | 0.13 μm |
Reflectivity of MoS2 surface R | 0.45 |
In-plane thermal conductivity k r | 0.016 × 10−3 W/(μm·k) |
Out-of-plane thermal conductivity k z | k r /100 |
Thermal conductivity between MoS2 and substrate k sub | 0.4·k z |
Gaussian beam with spatial distribution of intensity I i (r) | \(\frac{{I}_{{i}^{max}}\times {e}^{[-(2{r}^{2})/{r}_{g}^{2}]}\times 2}{\pi {r}_{g}^{2}}(i=1,2,\ldots f)\) |
