Figure 5

Spatial coherence measurement by Young’s double slit experiment. (a) SEM images of the double slit. (b) Optical configuration. Young’s double slit interferograms were recorded under five different illuminations, (c) a white light (WL), (d) a CW laser, (e) a CW laser, with a static diffuser (SD) and moving diffuser (MD) in the illumination path with a diffusion angle (DA) of 1°, (f) a CW laser, SD/MD, DA = 6°, and (g) a CW laser, SD/MD, DA = 12°, The normalized intensity line profiles are shown below. LD: laser diode, OA: optical attenuator, L: lens, OD: optical diffuser, DS: double slit, and CCD: charge coupled device.