Figure 3
The relationship between the line width and the gold salt concentration in the resin mixture. Five samples (with 0%, 5%, 10%, 15% and 20% of gold salt) were prepared under the same processing conditions. A group of lines were fabricated using laser power of 50 mW and scanning speed of 5000 µm/s. The SEM image on the left shows the sample without gold. The average line width is 466 nm. The SEM image on the right shows the sample prepared with 20% gold salt present in the resin mixture. The average line width is 97 nm. Both images were taken with 40,000x magnification. The inserted image shows the minimum achievable line width is 78 nm.
